@article{
  author = {R.B. Bergmann and A. Fischer and C. Bockelmann and A. Dekorsy and A. Garcia-Ortiz and C. Falldorf},
  year = {2022},
  month = {May},
  title = {The coherence function and its information content for optical metrology},
  volume = {89},
  number = {6},
  pages = {397-412},
  journal={tm - Technisches Messen}
}