@inproceedings{
  author = {M. Abdollahpour and C. Bockelmann, Tajim Md Hasibur Rahman, Dirk St\"{o}bener, Andreas Fischer},
  year = {2025},
  month = {Aug},
  title = {Scatterometric defect detection of nanowire surfaces: evaluating the effect of sensor position density},
  booktitle={SPIE Optical Metrology}
}