@article{
  author = {M. Abdollahpour and C. Bockelmann and A. Dekorsy, Tajim Md Hasibur Rahman, Andreas Fischer},
  year = {2026},
  month = {Jan},
  title = {Compressed Learning for Nanosurface Deficiency Recognition Using Angle-Resolved Scatterometry Data},
  journal={IEEE Access}
}