The coherence function and its information content for optical metrology
| Authors: | R.B. Bergmann, A. Fischer, C. Bockelmann, A. Dekorsy, A. Garcia-Ortiz, C. Falldorf |
| Document type: | Journal Paper |
| Publication: | May 2022 |
| Journal: | tm - Technisches Messen |
| Pages: | 397-412 |
| Volume: | 89 |
| Number: | 6 |
| Files: | BibTEX |
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