Scatterometric defect detection of nanowire surfaces: evaluating the effect of sensor position density
| Authors: | M. Abdollahpour, C. Bockelmann, Tajim Md Hasibur Rahman, Dirk Stöbener, Andreas Fischer |
| Document type: | Conference Paper |
| Publication: | Germany, 8. August 2025 |
| Conference: | SPIE Optical Metrology |
| Files: | BibTEX |
Last change on
10.09.2025
by
M. Abdollahpour
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