Compressed Learning for Nanosurface Deficiency Recognition Using Angle-Resolved Scatterometry Data - Department of Communications Engineering

Compressed Learning for Nanosurface Deficiency Recognition Using Angle-Resolved Scatterometry Data

Authors:

M. Abdollahpour, C. Bockelmann, A. Dekorsy, Tajim Md Hasibur Rahman, Andreas Fischer

Document type:

Journal Paper

Publication:

January 2026

Journal:

IEEE Access

Files:

BibT_EX

Last change on 23.01.2026 by M. Abdollahpour

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